Microfabrication for industrial applications

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Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

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Taal: en

Bindwijze: E-book

Oorspronkelijke releasedatum: 31 augustus 2011

Aantal pagina's: 312

Ebook Formaat: Adobe ePub

Illustraties: Nee

Hoofdauteur: Regina Luttge

Tweede Auteur: J.G.E. Gardeniers

Hoofduitgeverij: William Andrew

Lees dit ebook op: Android (smartphone en tablet)

Lees dit ebook op: Kobo e-reader

Lees dit ebook op: Desktop (Mac en Windows)

Lees dit ebook op: iOS (smartphone en tablet)

Lees dit ebook op: Windows (smartphone en tablet)

Extra groot lettertype: Nee

Studieboek: Ja

Verpakking breedte: 191 mm

Verpakking hoogte: 235 mm

Verpakking lengte: 235 mm

Verpakkingsgewicht: 0 g

EAN: 9780815519775

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