Introduction to microfabrication 2nd

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The first edition of this book published in 2004 and has proved to be both a valuable textbook and a handy desk reference. This new edition continues to provide students with an accessible guide to an important field. Fully updated, it has five new chapters that incorporate the recent developments in the field.

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.

This second edition includes:

expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book

With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.

www.wiley.com/go/Franssila_Micro2e

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.

This second edition includes:

expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book

With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.

www.wiley.com/go/Franssila_Micro2e

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Taal: en

Bindwijze: Hardcover

Oorspronkelijke releasedatum: 17 september 2010

Aantal pagina's: 518

Illustraties: Nee

Hoofdauteur: Sami Franssila

Hoofduitgeverij: John Wiley & Sons Inc

Editie: 2

Extra groot lettertype: Nee

Product breedte: 198 mm

Product hoogte: 34 mm

Product lengte: 252 mm

Studieboek: Ja

Verpakking breedte: 198 mm

Verpakking hoogte: 254 mm

Verpakking lengte: 37 mm

Verpakkingsgewicht: 1206 g

EAN: 9780470749838

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